美国MKS阀门 MKS 153B/253B/653B排气节流阀
美国MKS 153B智能排气节流阀专为电脑控制的应用where a simple pressure control system is desired the一个简单的压力控制系统的期望,Type 153 Valve integrates all control communication and153型阀集成了所有的控制,通信,和driver circuits via a compact “add-on” electronics module驱动电路通过一个紧凑的“附加”的电子模块within a Type 253 Throttle Valve assembly eliminating the253型节流阀总成内,消除need for a separate pressure control electronics module.一个单独的压力控制电子模块。The 153 is operable in two modes flapper positioning or153在两种模式操作,挡板定位或pressure control.压力For DeviceNet™ communications consult ApplicationsDeviceNet™通信咨询应用Engineering on the Type 683.在683型。
MKS 253型排气节流阀调节removal of gas from a processing system. Its flapper从处理系统去除气体。它的挡板is positioned to modulate gas flow thereby controlling设置调节气体的流量,从而控制process pressure. The 253 has a non-linear actuator工艺过程的压力。253有一个非线性执行器placed between the flapper shaft and the motor drive shaft把挡板轴和电机轴之间in order to generate a linear valve transfer characteristic为了产生一个线性阀的传递特性and provide smooth linear pressure control. The MKS Type并提供平稳的线性压力控制。MKS型253 is available in standard sizes and flange styles and is253在标准尺寸和法兰是可用的,并compatible with all MKS throttle valve controllers.所有的MKS节流阀控制器兼容。
美国MKS 653B排气节流阀高速电机和齿轮或驱动组件provides fast response to a given set point to quickly提供快速响应一个给定的设定点的快速achieve desired pressure and increase system throughput.达到所需的压力和增加系统的吞吐量。High accuracy is attained by micro-stepping the flapper to高精度的步进挡板微达到give more precise control and no drift of pressure at the给出了更的控制,无漂移,在压力desired set point. The 653 has sufficient torque to operate设定点。653有足够的扭矩操作sealing valves up to four inches and non-sealing valves to阀门的密封和非密封高达四英寸的阀门12 inches to prevent clogging from contamination buildup.12英寸,防止堵塞污染积累。The valve body can be heated up to 150°C (using optional阀体可加热到150°C(使用可选sealing materials) for operation in high temperature密封材料)操作在高温度applications and processes. The Type 653 has a flapper应用程序和进程。653型有一个挡板position indicator to identify valve angle during system位置指示器在系统识别阀角troubleshooting is available in a variety of sizes and flange故障排除,有各种尺寸和法兰styles and is compatible with MKS Type 651 and 1651风格,并与MKS型651和1651兼容Controllers.控制器。
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美国MKS阀门 MKS 153B/253B/653B排气节流阀
美国MKS 153B智能排气节流阀专为电脑控制的应用where a simple pressure control system is desired the一个简单的压力控制系统的期望,Type 153 Valve integrates all control communication and153型阀集成了所有的控制,通信,和driver circuits via a compact “add-on” electronics module驱动电路通过一个紧凑的“附加”的电子模块within a Type 253 Throttle Valve assembly eliminating the253型节流阀总成内,消除need for a separate pressure control electronics module.一个单独的压力控制电子模块。The 153 is operable in two modes flapper positioning or153在两种模式操作,挡板定位或pressure control.压力For DeviceNet™ communications consult ApplicationsDeviceNet™通信咨询应用Engineering on the Type 683.在683型。
MKS 253型排气节流阀调节removal of gas from a processing system. Its flapper从处理系统去除气体。它的挡板is positioned to modulate gas flow thereby controlling设置调节气体的流量,从而控制process pressure. The 253 has a non-linear actuator工艺过程的压力。253有一个非线性执行器placed between the flapper shaft and the motor drive shaft把挡板轴和电机轴之间in order to generate a linear valve transfer characteristic为了产生一个线性阀的传递特性and provide smooth linear pressure control. The MKS Type并提供平稳的线性压力控制。MKS型253 is available in standard sizes and flange styles and is253在标准尺寸和法兰是可用的,并compatible with all MKS throttle valve controllers.所有的MKS节流阀控制器兼容。
美国MKS 653B排气节流阀高速电机和齿轮或驱动组件provides fast response to a given set point to quickly提供快速响应一个给定的设定点的快速achieve desired pressure and increase system throughput.达到所需的压力和增加系统的吞吐量。High accuracy is attained by micro-stepping the flapper to高精度的步进挡板微达到give more precise control and no drift of pressure at the给出了更的控制,无漂移,在压力desired set point. The 653 has sufficient torque to operate设定点。653有足够的扭矩操作sealing valves up to four inches and non-sealing valves to阀门的密封和非密封高达四英寸的阀门12 inches to prevent clogging from contamination buildup.12英寸,防止堵塞污染积累。The valve body can be heated up to 150°C (using optional阀体可加热到150°C(使用可选sealing materials) for operation in high temperature密封材料)操作在高温度applications and processes. The Type 653 has a flapper应用程序和进程。653型有一个挡板position indicator to identify valve angle during system位置指示器在系统识别阀角troubleshooting is available in a variety of sizes and flange故障排除,有各种尺寸和法兰styles and is compatible with MKS Type 651 and 1651风格,并与MKS型651和1651兼容Controllers.控制器。
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