HORIBA化学药液浓度计CS-700改进 HORIBA 的光谱测量技术测量性能提升高达 5 倍

2025/02/13 14:36:01

CS-700

高精度、高稳定性化学药液浓度计

HORIBA CS-700 化学药液浓度计能够对*半导体制程中使用的复杂化学药液的单个化学成分进行高性能测量。
通过改进 HORIBA 的光谱测量技术，CS-700 测量性能提升高达 5 倍。
提供增强的质量控制，改进半导体制程。

事业部: 半导体

产品分类: 湿法过程控制

制造商: HORIBA Advanced Techno Co., Ltd.

Measurement Range and Repeatability

Unit : mass%

	Component	Measurable range	Repeatability
1st solution	HNO3	30.0 - 34.0	±0.5
	HF	2.00 - 4.00	±0.10
	H3PO4	35.0 - 39.0	±0.6
	H2SiF6	0.00 - 3.00	±0.50
	H2O	25.0 - 33.0	±1.0

scrollable

Conditions of measurement
1) Measurement interval: approx. 8 sec.
2) Moving average time :10 times
3) Atmospheric temperature, chemical temperature fluctuation: within +/- 1 degree C (period of time: 1hour). Sudden temperature change should be avoided
4) Condition of sample temperature: 20 to 30 degree C

Repeatability is the maximum deviation from average measured value over a 1 hour continuous measurement period.
The values in the above table are assigned analog output values between 4 - 20 mA. (makimum resistance of 500Ω)

Specifications Comparison with Previous Model

item	CS-100	CS-700
Measurement principle	Absorption spectroscopic method	Absorption spectroscopic method
Sample temperature	20 to 30 Degree C	20 to 30 Degree C
Ambient temperature	20 to 25 Degree C	20 to 30 Degree C
Components	Max. 4 components	Max. 8 components
Chemical range	Max. 4 ranges	Max. 6 ranges
Communication	Parallel I/O, Analog output, RS-232C	Parallel I/O, Analog output, RS-232C
Analog output (4-20 mA)	Max. 2 components	Max. 6 components
Dimension	205(W) X 329(D) X 269(H)mm	218(W) X 391(D) X 213(H)mm
Power source	DC 24V	DC 24V(Same connecter of CS-100)
Consumable parts	Halogen lamp	Halogen lamp (Same as CS-100 type)
Wavelength	UV/NIR	UV/NIR
Wetted material	PTFE, PFA, Sapphire or Quartz,	PTFE, PFA, Sapphire, Kalrez 4079 O-ring

scrollable

Schematics

适合控制化学药液的单个成分。

实时、高性能检测多达 8 种组分
无需试剂，零样品消耗，降低拥有成本
安装简单，即装即用

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