首页 >北崎国际贸易（北京）有限公司> 技术文章> HORIBA光纤型化学药液浓度计CS-152F1每台浓度计可实现多达四种药液的测量
HORIBA光纤型化学药液浓度计CS-152F1每台浓度计可实现多达四种药液的测量
2025/02/13 14:17:00
| Model | CS-151F1 | CS-152F1 | CS-150F1 |
|---|---|---|---|
|
Target of measurement |
SC-1 (ammonia/hydrogen peroxide aqueous solution) |
SC-2 (hydrochloric acid/hydrogen peroxide aqueous solution) |
SPM (sulfuric acid/hydrogen peroxide aqueous solution) |
| Multi-monitoring with one unit of up to 4 types of chemical solutions or ranges possible. | |||
| Measurement principle | Absorption spectrometry | ||
|
Concentration computation principle |
Temperature-compensated multivariate analysis | ||
|
Measurement range (mass %) |
NH3: 0.00% to 1.00% H2O2: 0.00% to 5.00% H2O: 94.0% to 100.0% |
HCI: 0.00% to 2.00% H2O2: 0.00% to 2.00% H2O: 96.0% to 100.0% |
H2SO4: 70.0% to 96.0% H2O2: 0.00% to 10.00% H2O: 4.0% to 30.0% |
|
Repeatability (mass %) (within ±1% room temperature) |
NH3: ±0.15% H2O2: ±0.30% H2O: ±1.5% |
HCI: ±0.15% H2O2: ±0.15 % H2O: ±1.5% |
H2SO4: ±0.50% H2O2: ±0.50% H2O: ±1.5% |
|
・Repeatability for the list above is for the cell unit type.Please contact us for the repeatability of the in-line cell type. ・Differences in the above list may occur depending on measurement range.(Please see our website for details.) |
|||
| Sample solution temperature | 20 to 80: (when using Inline cell) 20 to 30: (when using cell unit) | ||
| Measurement cycle | Approx. 3 seconds | ||
|
Content of LCD and input |
• 1st component: measured concentration value (%) •Error code • 2nd component: measured concentration value (%) •Parallel concentration alarm output invalid status • 3rd component: measured concentration value (%) •Serial/parallel status • 1st and 2nd components: concentration alarm status •Background compensation data |
||
| RS-232C serial input |
• Serial/parallel status switching •Parallel concentration alarm output status • Measurement data transfer request (valid/invalid) • 1st and 2nd component concentration alarm setting •Target measurement solution switching |
||
| Parallel input |
12 to 30 V DC (photocoupler insulated) • Parallel concentration alarm output • Target measurement solution switching • Background compensation |
||
| Parallel output |
Open collector output (photocoupler insulated) • 1st component concentration alarm, 4 types Max. current when on: • 2nd component concentration alarm, 4 types DC 5 mA (no internal protection resistor) • Device error Max. impressed voltage when off: 30 V DC • Measuring • Target measurement solution type • Background compensation status |
||
| Solution temperature input |
Terminal block connection (M3 terminal screws) • Platinum resistance temperature sensor: Pt100 (Pt100 sensor should be prepared by customers) |
||
| Analog output |
• 1st component concentration alarm, 4 types: 4 to 20 mA • 2nd component concentration alarm, 4 types: 4 to 20 mA ✽We also support other measurement ranges. Please specify when ordering. |
||
| Fiber optic cable | Dedicated CS-100F1 Series fiber optic cable (25 ±15: installation temperature) | ||
| Sample cell | We can supply dedicated sample cells (inline cell or cell unit) for various kinds of chemical solutions. | ||
| Power supply | 100 V to 230 V AC (single phase) ±10%, 50/60 Hz, approx. 100 VA | ||
| Dimensions | 205 (W) x 329 (D) x 269 (H) mm 8.1 (W) x 13.0 (D) x 10.6 (H) in (excluding protruding part) | ||
| Weight | Approx. 11 kg | ||
Note: Please consult us regarding concentration monitors for chemical solutions other than those given above.
Schematics
Concentration monitor
Inline cell Cell unit
-
使用在线样品单元实时跟进浓度信息
使用直接连接清洗系统主管路的在线样品单元实时检测浓度。 -
多达四种药液的多重检测
每台浓度计可测量多达四种化学药液或浓度范围。用户可单次检测多种化学药液的浓度（或不同配比的化学药液），如单槽或单晶圆清洗系统。 -
更高精度的样品单元类型
为保证稳定性，还提供一种样品单元类型，支持使用浓度计输出信号反馈进行控制。该浓度计还支持将化学药液浓度保持在可接受的范围内，并消除不必要的化学药液变化。 - 电气单元和测量单元完全分离，安全安装
- 符合 RoHS 标准
