CS-620F

光纤型高温磷酸浓度计

关键词：3D NAND、SiN（氮化硅）、刻蚀、高温磷酸,

在 3D NAND 制程中，沉积几十层二氧化硅和氮化硅，并使用高温磷酸选择性地刻蚀氮化硅层。
在该制程中，通过控制化学药液的浓度和温度，可以获得期望的刻蚀速率。
成熟型号很难测量高温化学药液，但 CS-620F 能够在高达 170℃ 的高温下进行测量。
使用吸收光谱进行连续测量，与其他方法相比，需要的维护和耗材更少。

事业部: 半导体

产品分类: 湿法过程控制

制造商: HORIBA Advanced Techno Co., Ltd.

主要特征

可测量高达 92% 的高浓度磷酸

无需冷却机制和冷却时间。
无需冷却循环管路中的高温磷酸（140 至 170℃），可直接测量。

样品使用PFA接触，以降低污染风险。

采用每半年一次的背景校正周期，有助于显著减少机台停机时间。

每3秒更新一次测量数据，有助于更快速使用浓度反馈进行控制

稳定性

▶ 测量结果
样品（实际药液）测量 1 小时，展示出良好的稳定性。

▶ 测量条件
测量周期：每3秒测量时间：1 小时移动平均数：16 次
样品浓度（初始样品浓度）H3PO4：92.2% H2O: 7.8% 样品温度：141°C

Product name CHEMICAL SOLUTION MONITOR

Model CS-620F

Measurement principle Absorption spectroscopic method

Calculation principle Temperature compensation type multivariate analysis

Sample H3PO4/H2O

Measurable range
Repeatability
Component Measurable range
(mass%) Repeatability
(mass%) Analog output
range(mass%)

1st solution H3PO4 85.00-92.00 +/-0.10 85.00-100.00

H2O 8.0-15.0 +/-0.3 0.0-15.0

・ Repeatability is defined by maximum error from average (1 hour).
・ In the case of low temperature measurement (140°C) and high temperature measurement (170°C) with the same chemical,
there is possibility of discrepancy (Maximum +/- 0.30%).

Conditions
of Measurement 1) Measurement interval: Approx. 3 sec. (minimum)
2) Moving average: 16 times

Connection fitting size 1 inch or 3/4 inch

Sample condition Sample temperature: 140 to 170°C
Atmospheric temperature, Chemical temperature fluctuation: within +/- 1°C (period of time : 1 hour)
Input pressure: 0.2 MPa or less
Pressure fluctuation: 0.02 MPa or less
Flow rate: 1 to 30 L/min

Air(for operation and purge) Connection port: 4 mm O.D. quick joint
Pressure: 0.2 MPa ± 0.02 MPa

Power source 100 to 230 V AC (Single-Phase), 50/60 Hz

Power consumption Approx.85 VA (Transient electric current at the time of the start is excluded)

Communication Parallel I/O, RS-232C, Analog output

Dimension (Monitor) 200 (W) × 308 (D) × 78 (H) mm
(Lamp unit) 200 (W) × 262 (D) × 100 (H) mm
(Sample cell) 240 (W) × 209 (D) × 205 (H) mm

Weight (Monitor) Approx.3.6 kg
(Lamp unit) Approx.2.8 kg
(Sample cell) Approx.3.0 kg

Ambient temperature (Monitor, Lamp unit) 20 to 30°C
(Optical fiber, Sample cell) 20 to 100°C
* Sudden temperature change should be avoided, within +/- 1°C/1hour

Ambient humidity (Monitor, Lamp unit) 40 to 70% (Should be no dew condensation)

Slanting angle of installation (Monitor, Lamp unit) Within +/-1 degree
(Sample cell) Please install so that air bubbles do not stay up.

Optical fiber Length: 5 m, Bend radius: R150 mm

资料

NEWS

HORIBA光纤型高温磷酸浓度计CS-620F可以在单槽或单晶圆清洗系统中检测多种化学药液

CS-620F

光纤型高温磷酸浓度计

主要特征

稳定性

Product name	CHEMICAL SOLUTION MONITOR
Model	CS-620F
Measurement principle	Absorption spectroscopic method
Calculation principle	Temperature compensation type multivariate analysis
Sample	H3PO4/H2O
Measurable range Repeatability		Component	Measurable range (mass%)	Repeatability (mass%)	Analog output range(mass%)
	1st solution	H3PO4	85.00-92.00	+/-0.10	85.00-100.00
	1st solution	H2O	8.0-15.0	+/-0.3	0.0-15.0
	・ Repeatability is defined by maximum error from average (1 hour). ・ In the case of low temperature measurement (140°C) and high temperature measurement (170°C) with the same chemical, there is possibility of discrepancy (Maximum +/- 0.30%).
Conditions of Measurement	1) Measurement interval: Approx. 3 sec. (minimum) 2) Moving average: 16 times
Connection fitting size	1 inch or 3/4 inch
Sample condition	Sample temperature: 140 to 170°C Atmospheric temperature, Chemical temperature fluctuation: within +/- 1°C (period of time : 1 hour) Input pressure: 0.2 MPa or less Pressure fluctuation: 0.02 MPa or less Flow rate: 1 to 30 L/min
Air(for operation and purge)	Connection port: 4 mm O.D. quick joint Pressure: 0.2 MPa ± 0.02 MPa
Power source	100 to 230 V AC (Single-Phase), 50/60 Hz
Power consumption	Approx.85 VA (Transient electric current at the time of the start is excluded)
Communication	Parallel I/O, RS-232C, Analog output
Dimension	(Monitor) 200 (W) × 308 (D) × 78 (H) mm (Lamp unit) 200 (W) × 262 (D) × 100 (H) mm (Sample cell) 240 (W) × 209 (D) × 205 (H) mm
Weight	(Monitor) Approx.3.6 kg (Lamp unit) Approx.2.8 kg (Sample cell) Approx.3.0 kg
Ambient temperature	(Monitor, Lamp unit) 20 to 30°C (Optical fiber, Sample cell) 20 to 100°C * Sudden temperature change should be avoided, within +/- 1°C/1hour
Ambient humidity	(Monitor, Lamp unit) 40 to 70% (Should be no dew condensation)
Slanting angle of installation	(Monitor, Lamp unit) Within +/-1 degree (Sample cell) Please install so that air bubbles do not stay up.
Optical fiber	Length: 5 m, Bend radius: R150 mm